Using the Conformity Discovery Process©
We walk you through every step to get your SEMl S2 certification: no need to be a Standards Expert. We got it covered!
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SEMI S2 is the basis of semiconductor equipment safety programs. The standards written by the SEMI organization led the way for safety of semiconductor manufacturing equipment and the handling of hazardous semiconductor manufacturing materials. This is to say, SEMI is the key semiconductor industry standards body. Throughout the industry, you will find that these standards are required for your equipment to achieve customer acceptance. With literally thousands of pieces of equipment implemented through our company, we certainly have the background and depth to support you through design, testing, evaluation and certification.
Contact us early so that we can support you with rapid development of conforming semiconductor equipment.
SEMI S2 and SEMI S2-0712a
Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Previous versions of the standard include SEMI S2-0200, SEMI S2-0302, SEMI S2-1102 & SEMI S2-0303, SEMI S2-0703 SEMI S2-93, SEMI S2-93A.
Types of equipment
SEMI S2 is applicable to all types of semiconductor manufacturing equipment. For example, it applies to: Ion Implanters, Litho Equipment, Wet Benches, Etchers, Mask Aligners, CVD, Saws, Spin Coaters and any other equipment in the Fab. Additionally, it applies to Implanters, Clean Tracks, Chemical Dispense Systems, Bulk Gas Distribution, Gas Cabinets, Gas Source Cabinets, Metrology Systems, Test Systems, CMP Systems, Furnaces, Sub-Systems, and Industrial Lasers.
Capabilities and Offerings
Our team was part of the group that wrote SEMI S2 and even provided leadership for the writing committee, as well as direction to ensure it was adequate as a guideline for the semiconductor safety industry. High Tech Design Safety, LLC was one of the first companies to provide S2 evaluation and certification services. In short, HTDS provides full turnkey services to complete your certification, evaluation, and testing. Consequently, we have performed S2 evaluations on nearly every single type of semiconductor equipment in your factory.
Summary of the Standard
The semiconductor equipment industry created SEMI S2 with the goal to increase semiconductor equipment safety. Therefore, the standard includes safety labeling, Quitman design, operator interface, ergonomics, safety interlock systems, emergency shutdown, electrical design, fire protection, heated chemical baths, hazardous energy isolation, lockout, mechanical design, seismic protection, automated material handling equipment, environmental considerations, exhaust ventilation, chemicals, ionizing radiation, nonionizing radiation, lasers, sound pressure level measurement, and fire protection.
Often, designers and manufacturers miss the interaction of standards and their design needs. Therefore, contact us for an outline of typical non-conformances. Certainly, working with High Tech Design Safety will help you shorten design time and decrease product cost.
Prep for Conformance
Step one is to contact High Tech Design Safety, LLC to prep a design guide document for your specific piece of equipment and SEMI S2 hazards associated.
Frequently Asked Questions
Resources From The Field
A Proven path to conformance Contact Us Share Share on linkedin LinkedIn Share on twitter Twitter Share on facebook Facebook Share on email Email Today, we are going to answer the questions, what is tracer gas testing and SEMI S6. This is one of the many services that we here at High Tech Design Safety,
The cost for tracer gas testing has several variable. Some of the variables include the chemicals used, the number of chambers, and the number of exhaust ducts. The cost for simplest project is $8,500. In general, common chemicals and one or two test chambers with one or two exhaust ducts will cost $9,999, plus travel.
The basic timeline for Tracer Gas testing is about 3 weeks for the full process after the PO is received and all data is collected. The actions that are included in the timeline are generating test plans and getting test plan approvals. Next, there is the actual testing process and this is depending on whether