High Tech Design Safety CEO, Steve Barcik Amstel has been going through section-by-section and line-by-line of SEMI S2 in a video training course to help you get a better understanding of what you will be up against as you get your semiconductor equipment to market. The section that we have been covering is Section 9, which includes all of the documentation required to be provided to the end user. Last time we completed Section 9.6, which specifically talked about the Manuals and all of the various pieces of information that must be included. Today we talk about Section 9.7 Fire Protection Documentation.
Link to video also available here: https://youtu.be/XVYsIUhuBqg
Section 9.7 Fire Protection Documentation covers fire protection and detection.
This is a great section mainly because we can really dig in here for you. The intention is to provide you and your teams the information so that you can design, build and implement equipment safely.
SEMI S14 is the related standard, which talks about how to quantify the risks of fire within the equipment. This section requires that you provide data on those risks and a summary report of those risks.
Additionally in this section, you want to provide details on the standard features of your equipment for fire prevention, detection and suppression. And additionally provide details on any optional fire detection or suppression devices that can be purchased with your equipment. This will deal with alarms, signaling and fire alarms and strobes and all those neat things that are fun to deal with. We will get deeper into those as we go through the fire protection section of SEMI S2. For now though we will have to document all of that material…the manuals for the fire detection equipment, the manuals for the fire suppression equipment, and a summary of the risks will need to be provided to the end user in this section of SEMI S2.
Related documents include;
SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E70 — Guide for Tool Accommodation Process
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guidelines for Environmental, Safety, and Health (ESH) Evaluation of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process For fire suppression and detection equipment;
National Fire Protection Association: NFPA 12 — Standard on Carbon Dioxide Fire Extinguishing Systems
National Fire Protection Association: NFPA 13 —Standard for the Installation of Sprinkler Systems
National Fire Protection Association: NFPA 72 —National Fire Alarm Code
National Fire Protection Association: NFPA 2001 —Standard on Clean Agent Fire Extinguishing Systems
Materials of construction
Factory Mutual Research Corp. Standard 4910 — Clean Room Materials Flammability Test Protocol
Underwriters Laboratory Standard 94 — Tests for Flammability of Plastic Materials for Parts in Devices and Appliances
Underwriters Laboratories Standard 746A — Polymeric Materials – Short Term Property Evaluations
Underwriters Laboratories Standard 746B — Polymeric Materials – Long Term Property Evaluations
Underwriters Laboratories Standard 746C — Polymer
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