SEMI S2 – Evaluation Process Part 2

Share on linkedin
Share on twitter
Share on facebook
Share on email

Documentation is a huge part of getting your equipment to market. Getting through the SEMI S2 evaluations is a part of the process and an evaluator will evaluate your equipment. Pulling together the documentation and requirements is going to be necessary and will make a big difference in the ease and completion of this part of the process. This is our continuing video training series on SEMI S2, the safety guideline for semiconductor manufacturing equipment.

In this video our CEO, Steve Barcik Amstel covers Section 8, which pertains to documentation that needs to be provided to the evaluator.


(Link to video also available here:


The documents that you are going to need to provide are the manuals…the installation manual, the operations manual and the maintenance manual. If you lack those at this time, there is broiler plate available to prepare your manuals and have them work for you. If you need any additional information on creating your manuals there are other standards within the SEMI guidelines that can help you put that information together and complete it in such a way that it meets the other standards.

Additionally, requirements include the intended use, which will be included in the manual. Other requirements include the serial number, the model number, and we need to put down the location and then the time and date of the evaluation and the time and date of the report.

Further information that is required for the evaluation would be detailed data and parts lists and conformity lists for your safety interlock systems…any of that safety related equipment. We will need all of that data. So, for safety related equipment, also include fire detection and suppression equipment, gas detection equipment…suppression for your gas will be your exhaust and exhausted enclosures, we will get into that later. For each of those devices, you need full characterization and suitability for use data. This suitability for use data will be included in your bill of materials (BOMs), which will include all critical components… so any safety related components. It will also include any electrical components operating above 240-volt amps. Anything operating at line voltage of course and then anything operating at fairly high power at 240 va or more will be included in that report and BOM.

We here at High Tech Design Safety have a template that you can use to collect that data and put it in. And as you collect the data we will want to go ahead and collect the UL, TUV or whatever listing body has listed or recognized that component as suitable for use.

Additional reports that we will help you create or that you may already have or we will create wholly for you will include an ergonomics assessment, a fire risk assessment, and then that safety functional assessment that we talked about earlier. Additionally, you will need a risk analysis of your equipment, its operation, installation, and maintenance as well.

Further documentation required for the evaluation will include industrial hygiene evaluation of the equipment. That includes all of the chemicals, their types, their toxicity, their occupational exposure limits, and more data even. If you do have chemicals and they are toxic or flammable, you will need an industrial hygiene report and testing, which indicates the ability to contain and control those chemicals to prevent release, exposure, and fire or explosion. We here at High Tech Design Safety are able to do this testing for you as well either as a preliminary or as a final for the development of your SEMI S2 evaluation.

Additionally, we will need environmental information, meaning, a chemical list, details of gases and liquids, and any solid sources, release rates, exhaust rates, containment process, so if you have a spill…how is it contained? And then details of all the drains and everything else for the environmental sections of SEMI S2. We will also look to SEMI S3 and SEMI S14 for supporting the evaluations. SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment, SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process, SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment, SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment.

This combined totals all the documentation required for the SEMI S2 report. For some of you a lot of these items will not be required and… Steve didn’t cover some of the other items like is there any radiation? Are there any lasers? Are there any material handling equipment or other things like that? We will need that documentation and he will cover those requirements in future videos of this training.

We appreciate your time. Please like and subscribe below and make comments or contact us directly if you have questions about the process and how to get this done. We would really like to help you with your SEMI S2 requirements and your equipment design review requirements.

High Tech Design Safety; SEMI S2, CE Marking, FCC, EMC/EMI, ATEX, UL tm , CSA, FDA, CDRH, NFPA 79, NFPA 70, CE Mark, EU Acceptance, Codes, Audits, and Solid Advice…

Get In Touch

Have Questions or Need Specifics? Let's Get This Conversation Started


+ 1 512 266 0222


Austin Location

4601 Hudson Bend Rd

Suite #777

Austin, TX  78734

Send A Message